High-Q micromechanical resonator devices and filters utilizing same are
provided. The devices and filters include a vibrating polysilicon
micromechanical "hollow-disk" ring resonators obtained by removing
quadrants of material from solid disk resonators, but purposely leaving
intact beams or spokes of material with quarter-wavelength dimensions to
non-intrusively support the resonators. The use of notched support
attachments closer to actual extensional ring nodal points further raises
the Q. Vibrating micromechanical hollow-disk ring filters including
mechanically coupled resonators with resonator Q's greater than 10,000
achieve filter Q's on the order of thousands via a low-velocity coupling
scheme. A longitudinally mechanical spring is utilized to attach the
notched-type, low-velocity coupling locations of the resonators in order
to achieve a extremely narrow passband.