The present invention provides a salt of the formula (I) ##STR00001## wherein X represents --OH or --Y--OH, n shows an integer of 1 to 9, A.sup.+ represents an organic counter ion, Y represents a divalent saturated aliphatic hydrocarbon group having 1 to 6 carbon atoms.The present invention also provides a chemically amplified resist composition comprising the salt of the formula (I).