A method of forming a thin film by an ink jet method including the step of discharging a liquid containing thin film-forming materials and a solvent from liquid discharge ports to each position on a substrate while the liquid discharge ports are being moved relatively to the substrate, characterized in that subsequent droplets are arranged while a solvent vapor evaporating from droplets arranged previously on the substrate are compulsively removed from inside the substrate surface.

 
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> Silicon carbide bipolar junction transistors having epitaxial base regions and multilayer emitters and methods of fabricating the same

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