A process is described for depositing a metal film on a substrate surface
having a diffusion barrier layer deposited thereupon. In one embodiment
of the present invention, the process includes: providing a surface of
the diffusion barrier layer that is substantially free of an elemental
metal and forming the metal film on at least a portion of the surface via
deposition by using a organometallic precursor. In certain embodiments,
the diffusion barrier layer may be exposed to an adhesion promoting agent
prior to or during at least a portion of the forming step. Suitable
adhesion promoting agents include nitrogen, nitrogen-containing
compounds, carbon-containing compounds, carbon and nitrogen containing
compounds, silicon-containing compounds, silicon and carbon containing
compounds, silicon, carbon, and nitrogen containing compounds, or
mixtures thereof. The process of the present invention provides
substrates having enhanced adhesion between the diffusion barrier layer
and the metal film.