A method of fabricating a thin film transistor substrate for a display
device is provided. The method includes the steps of forming a gate line
and a gate electrode connected to the gate line; forming a gate
insulating film disposed covering the gate line and the gate electrode;
forming a semiconductor layer a on the gate insulating film; forming a
data line on the gate insulating film intersecting the gate line with the
gate insulating film between the data line and the gate line to define a
pixel region, a source electrode connected to the data line, a drain
electrode opposed to the source electrode with the semiconductor layer
therebetween, and a first upper storage electrode overlapping the gate
line with the gate insulating film and the semiconductor layer
therebetween; forming a protective film disposed covering the gate line,
the data line, and the thin film transistor; and forming a pixel
electrode connected on a side surface basis to the drain electrode and
the first upper storage electrode, and a second upper storage electrode
connected via a first contact hole to the first upper storage electrode
on a side surface basis.