A dual damascene interconnect structure is formed by patterning a first
dielectric to form a metal line. A second dielectric is disposed on the
first dielectric and patterned to form a via. The first metal line is
patterned in a configuration relative to a via landing so that a cavity
is formed when the via etch into the second dielectric is extended into
the first dielectric. The cavity is filled with a conductive metal in an
integral manner with the formation of the via to form a via projection
for improved electrical contact between the via and the metal line.