A method for determining a surface quality of a substrate sample using a
differential interference contrast microscope is described. The
microscope includes an eyepiece, an eyepiece focus adjustment, a
microscope focus adjustment, a light source, at least one of an aperture
or reticule, a camera view, a prism and an eyepiece. The method includes
calibrating the focus of the eyepiece with the focus of the camera and
determining a peak response ratio for the microscope through adjustment
of phase between differential beams of the microscope. The substrate
sample is placed under the microscope, illuminated with the light source,
and brought into focus with the microscope focus. Phase between
differential beams is adjusted, at least one image of the substrate
sample is captured and processed to determine a level of surface
structure on the substrate sample.