A vertical thin-film transistor (V-TFT) is provided along with a method
for forming the V-TFT. The method comprises: providing a substrate made
from a material such as Si, quartz, glass, or plastic; conformally
depositing an insulating layer overlying the substrate; forming a gate,
having sidewalls and a thickness, overlying a substrate insulation layer;
forming a gate oxide layer overlying the gate sidewalls, and a gate
insulation layer overlying the gate top surface; etching the exposed
substrate insulation layer; forming a first source/drain region overlying
the gate insulation layer; forming a second source/drain region overlying
the substrate insulation layer, adjacent a first gate sidewall; and,
forming a channel region overlying the first gate sidewall with a channel
length about equal to the thickness of the gate, interposed between the
first and second source/drain regions.