An electro-optical device includes, above a substrate: data lines
extending in a first direction; scanning lines extending in a second
direction and intersecting the data lines; pixel electrodes and thin film
transistors disposed so as to correspond to intersection regions of the
data lines and the scanning lines; storage capacitors electrically
connected to the thin film transistors and the pixel electrodes; and
shielding layers disposed between the data lines and the pixel
electrodes. Further, nitride films are included in the shielding layers
and are formed along the data lines and are wider than the data lines.