Methods for electrodeposition of copper on a noble metal layer of a work
piece are provided. An exemplary method includes exposing the noble metal
layer to an electrodeposition composition. The electrodeposition
composition comprises a copper salt, a suppressor, an accelerator and an
electrolyte. The electrodeposition of copper on a surface of the noble
metal layer is initiated by application of a predetermined current
density to the work piece. The electrodeposition of copper is terminated
upon the occurrence of a predetermined event.