Methods of manufacturing alumina abrasive for use in chemical mechanical
polishing are described, wherein the abrasive is in a slurry having gamma
alumina formed in a low temperature fuming process, water, an acid
sufficient to maintain the pH below about 7, wherein the slurry does not
settle appreciably in an 8 to 24 hour period. Advantageously, the alumina
is wet-milled without the use of wet-milling salt additives.