An apparatus for producing a beam of charged particles is provided, which
comprises an emitter (1, 2) and a switching device (3) adapted to switch
between first, second and third beam current levels, wherein the beam
current at said first current level is suitable for writing a pixel of an
image on the surface of a sample, the beam current at said second current
level is suitable for not writing a pixel on the surface of said sample,
and the beam current at said third current level is lower than the beam
current at the second current level. Furthermore, a method of controlling
the beam current of a charged particle beam is provided, comprising the
steps of switching the beam current of said charged particle beam between
first and second current levels, wherein the beam current at said first
current level is suitable for writing a pixel of an image on the surface
of a sample and the beam current at said second current level is suitable
for not writing a pixel on the surface of said sample, and switching the
beam current to a third voltage level, wherein the beam current at said
third current level is lower than the beam current at the second current
level.