Methods and apparatus for generating strongly-ionized plasmas are
disclosed. A strongly-ionized plasma generator according to one
embodiment includes a chamber for confining a feed gas. An anode and a
cathode assembly are positioned inside the chamber. A pulsed power supply
is electrically connected between the anode and the cathode assembly. The
pulsed power supply generates a multi-stage voltage pulse that includes a
low-power stage with a first peak voltage having a magnitude and a rise
time that is sufficient to generate a weakly-ionized plasma from the feed
gas. The multi-stage voltage pulse also includes a transient stage with a
second peak voltage having a magnitude and a rise time that is sufficient
to shift an electron energy distribution in the weakly-ionized plasma to
higher energies that increase an ionization rate which results in a rapid
increase in electron density and a formation of a strongly-ionized
plasma.