A method for fabricating scanning probe microscopy (SPM) probes is
disclosed. The probes are fabricated by forming a structural layer on a
substrate, wherein the substrate forms a cavity. A sacrificial layer is
located between the substrate and the structural layer. Upon forming the
structural layer, the sacrificial layer is selectively removed, and the
probe is then released from the substrate. The substrate may then later
be reused to form additional probes. Additionally, a contact printing
method using a scanning probe microscopy probe is also disclosed.