Magnetic Random Access Memory (MRAM) devices include a lower electrode and
a magnetic tunnel junction on the lower electrode. The magnetic tunnel
junction includes a seed layer and a tunneling barrier that is oriented
in a same direction as the most closely packed plane direction of the
seed layer. An oxide layer may be provided between the lower electrode
and the magnetic tunnel junction. The lower electrode may be a
titanium-rich TiN layer having more than 50 atomic percent titanium
content. Analogous fabrication methods are also described.