The present invention provides an apparatus and method for determining
displacement along the z-direction of an object, which is fixed in a
holder of an apparatus and is illuminated by a beam of radiation, the
beam being provided by the apparatus and having an optical axis extending
in the z-direction. The method comprises arranging the measuring
mirror(s) and/or measuring laser beam of an interferometer system such
that no relevant part of the laser beam is parallel to the z-direction.
This ensures that the interferometer system and its parts may be arranged
away from the beam of radiation, allowing larger diameter projection
systems for the beam of radiation, as well as more homogeneous air
showers around the object. Thus the quality of the illumination of the
object may be improved.