Methods are provided for fabricating a CMOS device having a silicon
substrate including a first N-type region and a second P-type region. The
method includes the steps of forming a first gate electrode overlying the
first N-type region and a second gate electrode overlying the second
P-type region. P-type source and drain regions are ion implanted into the
first N-type region, and N-type source and drain regions are ion
implanted into the second P-type region. First silicide regions, spaced
apart from the first gate electrode by a first distance, are formed
contacting the P-type source and drain regions, and second silicide
regions, spaced apart from the second gate electrode by a second distance
less than the first distance, are formed contacting the N-type source and
drain regions.