The invention proposes am improved twin MONOS memory device and its
fabrication. The ONO layer is self-aligned to the control gate
horizontally. The vertical insulator between the control gate and the
word gate does not include a nitride layer. This prevents the problem of
electron trapping. The device can be fabricated to pull the electrons out
through either the top or the bottom oxide layer of the ONO insulator.
The device also incorporates a raised memory bit diffusion between the
control gates to reduce bit resistance. The twin MONOS memory array can
be embedded into a standard CMOS circuit by the process of the present
invention.