A micromachined sensor for measuring vascular parameters, such as fluid
shear stress, includes a substrate having a front-side surface, and a
backside surface opposite the front-side surface. The sensor includes a
diaphragm overlying a cavity etched within the substrate, and a heat
sensing element disposed on the front-side surface of the substrate and
on top of the cavity and the diaphragm. The heat sensing element is
electrically couplable to electrode leads formed on the backside surface
of the substrate. The sensor includes an electronic system connected to
the backside surface and configured to measure a change in heat
convection from the sensing element to surrounding fluid when the sensing
element is heated by applying an electric current thereto, and further
configured to derive from the change in heat convection vascular
parameters such as the shear stress of fluid flowing past the sensing
element.