Systems and methods in accordance with the present invention can include a
tip contactable with a media. In an embodiment, the tip comprises a
substantially hollow structure formed of a metal. The tip can be formed
by depositing a first metal layer over silicon thereby defining a
cantilever structure, depositing a second metal layer at least partially
over the first metal layer, and at least partially over a cone structure
of the silicon to define the tip structure. The silicon can then be
removed from beneath the cantilever and from within the deposited second
metal layer by etching, thereby leaving a low-mass metal tip associated
with a metal cantilever. An alternative embodiment, the silicon can be
removed from beneath the cantilever by etching, but endpointed such that
at least a portion of the cone structure remains beneath the second metal
layer. The silicon/metal tip can have good wear characteristics and a
slightly higher mass.