A low parasitic capacitance Schottky diode including a lightly doped
polycrystalline silicon island that is formed on a shallow trench
isolation (STI) pad such that the polycrystalline silicon island is
entirely isolated from an underlying silicon substrate by the STI pad.
The resulting structure reduces leakage and capacitive coupling to the
substrate. Silicide contact structures are attached to lightly-doped and
heavily-doped regions of the polycrystalline silicon island to form the
Schottky junction and Ohmic contact, respectively, and are connected by
metal structures to other components formed on the silicon substrate. The
STI pad, polycrystalline silicon island, and silicide/metal contacts are
formed using a standard CMOS process flow to minimize cost. A bolometer
detector is provided by measuring current through the diode in reverse
bias. An array of such detectors comprises an infrared or optical image
sensor.