A polymer which is obtained from a combination of (meth)acrylate having a
bridged ring lactone group and (meth)acrylate having an acid leaving
group with a hexafluoroalcohol group is used as a base resin to formulate
a positive resist composition which when exposed to high-energy radiation
and developed, exhibits a high sensitivity, a high resolution, and a
minimal line edge roughness due to controlled swell during development.
The composition also has excellent dry etching resistance.