The present invention provides a process for forming a metal pattern in
which a metal is chemically absorbed, and a pattern forming material and
a crosslinkable monomer used for the process. The process includes: a
step for forming a pattern by photolithography including an exposure step
for carrying out exposure with a purified water-based developer having a
pH of less than 7 on a pattern forming material containing (A) a matrix
polymer having at least one of a carboxyl and a sulfonate group, and a
rinsing step; a step for forming a metal-containing pattern by immersing
the pattern in an aqueous solution containing a metal compound to allow
for chemical absorption of a metal ion or a complex ion to the pattern;
and a step for forming a metal pattern containing the elemental metal or
further containing metal oxide by sintering the metal-containing pattern.
A crosslinkable monomer containing a condensation product of a polyhydric
alcohol with N-methylol(meth)acrylamide was used.