A micro-machining method of manufacturing a micro fluxgate sensor
manufactured having an amorphous magnetic core includes forming lower
coils of an excitation coil and a magnetic field detecting coil on a
wafer, depositing a first insulating layer on the lower coils and forming
an amorphous magnetic core, depositing a second insulating layer on the
amorphous magnetic core and forming upper coils connected to the lower
coils to complete the excitation coil and the magnetic field detecting
coil, and covering the excitation coil and the magnetic field detecting
coil with a protective film, and etching the protective film to expose a
portion of the excitation coil and magnetic field detecting coil, thereby
forming a pad.