A method for fabricating a CMOS image sensor forms silicon nitride (SiN)
layer on a pad. Microlenses, having a minimum height and footprint
according to a desired packing density of the lenses, are fabricated of
an oxide film and a nitride film deposited on the silicon nitride. Since
the lenses have a low height, a refractive index of the lenses may be
improved. A sidewall spacer type inner lens may be additionally formed
below a main lens curvature to aid in overcoming problems caused by a
single-lens structure.