A solid electrolytic capacitor having a capacitor element which includes an anode foil and a cathode foil rolled with a separator interposed therebetween, and a solid electrolyte layer or an electrically conductive polymer layer provided therein. The anode foil is coated with a dielectric oxide film. The dielectric oxide film is an oxide film formed by oxidizing a film of a mono-metal nitride or a composite metal nitride formed on the anode foil. The mono-metal nitride is titanium nitride, zirconium nitride, tantalum nitride or niobium nitride. The composite metal nitride is aluminum titanium nitride, chromium titanium nitride, zirconium titanium nitride or titanium carbonitride.