Disclosed is an X-ray tube system with a disassembled carbon nanotube
substrate for generating micro focusing level electron beams. A housing
provides a vacuum space. An anode forms an electric field by a voltage
applied from the outside and accelerates the electrons emitted from the
cathode to reach the anode itself. A carbon nanotube substrate used as a
cathode corresponding to the anode. A cathode plate supports and fixes
the carbon nanotube substrate and applies a voltage to the carbon
nanotube substrate. A sample probe is installed
assemblably/disassemblably in the housing. A grid electrode is installed
in front of the carbon nanotube substrate and extracting electrons from
the carbon nanotube substrate in an easy manner. An electron focusing
lens focuses the electrons passed through the grid electrode to form a
micro level focus in the anode. A feed through applies a voltage to the
cathode, the grid electrode and the electron focusing lens. A vacuum pump
sustains a vacuum state inside the housing in exchanging the carbon
nanotube substrate. A vacuum valve isolates the inside from the outside
of the housing when the sample probe is inserted into the housing and
disassembled from the housing.