A method of fabricating a non-volatile memory is provided. A plurality of
columns of isolation structures are formed on a substrate. A plurality of
rows of stacked gate structures crossing over the isolation structures
are formed on the substrate. A plurality of doping regions are formed in
the substrate between two neighboring stacked gate structures. A
plurality of stripes of spacers are formed on the sidewalls of stacked
gate structures. A plurality of first dielectric layers are formed on a
portion of the isolation structures adjacent to two rows of stacked gate
structures. Also, one isolation structure is disposed between two
neighboring first dielectric layers in the same row, while two
neighboring rows comprising the first dielectric layer and the isolation
structure are arranged in an interlacing manner. A plurality of first
conductive layers are formed between two neighboring first dielectric
layers in the same row.