An apparatus for performing automated in-situ lift-out of a sample from a
specimen includes a computer having a memory with computer-readable
instructions, a stage for a specimen and a nano-manipulator. The stage
and the nano-manipulator are controlled by motion controllers connected
to the computer. The nano-manipulator has a probe tip for attachment to
samples excised from the specimen. The computer-readable instructions
include instructions to cause the stage motion controllers and the
nano-manipulator motion controllers, as well as an ion-beam source, to
automatically perform in-situ lift-out of a sample from the specimen.