A gas discharge laser system producing a laser output pulse and a method
of operating such a system is disclosed which may comprise a pulse
stretcher which may comprise a laser output pulse optical delay
initiating optic directing a portion of the laser output pulse along a
laser system output pulse optical axis and diverting a portion of the
output pulse into an optical delay having an optical delay path and which
may comprise a plurality of confocal resonators in series aligned to
deliver an output of the optical delay to the laser output pulse optical
delay initiating optic; an optical axis alignment mechanism comprising an
radial mirror positioning mechanism operable to position the output of
the optical delay to the align with the portion of the laser output pulse
transmitted along the optical axis of the portion of the laser system
output pulse transmitted by the laser output pulse optical delay
initiating optic.