The method measures the thickness of a hot glass body without direct contact with the glass body and is based on chromatic aberration. This method includes focusing a light beam from a light source on the hot glass body using a focusing device immediately after formation; conducting reflected light from the glass body into a spectrometer to obtain a reflected light spectrum; finding two wavelengths of the reflected light from the front side and the rear side of the glass body respectively at which reflected light intensities are maximum; determining the thickness of the glass body from the difference between the two wavelengths; maintaining the focusing device at a temperature below 120.degree. C. during the measuring of the thickness and substantially preventing heat radiation from reaching the focusing device using at least one heat-blocking filter.

 
Web www.patentalert.com

< Azimuthal scanning of a structure formed on a semiconductor wafer

> Driverless ellipsometer and ellipsometry

~ 00456