The present invention provides a back illuminated photodetector having a
sufficiently small package as well as being capable of suppressing the
scattering of to-be-detected light. A back illuminated photodiode 1
comprises an N-type semiconductor substrate 10, a P.sup.+-type doped
semiconductor region 11, a recessed portion 12, and a coating layer 13.
In the surface layer on the upper surface S1 side of the N-type
semiconductor substrate 10 is formed the P.sup.+-type doped semiconductor
region 11. In the rear surface S2 of the N-type semiconductor substrate
10 and in an area opposite the P.sup.+-type doped semiconductor region 11
is formed the recessed portion 12 that functions as an incident part for
to-be-detected light. Also, on the rear surface S2 is provided the
coating layer 13 for transmitting to-be-detected light that is made
incident into the recessed portion 12. The coating layer 13 is here
arranged in such a manner that the portion provided on the recessed
portion 12 is sunk lower than the portion provided on the outer edge
portion 14 of the recessed portion 12.