A thermal processing system includes a source of laser radiation having an
array of lasers emitting light at a laser wavelength, a substrate
support, optics disposed between said source and said substrate support
for forming a line beam in a substrate plane of the substrate support
from the light emitted by the source of laser radiation, and scanning
apparatus for effecting movement of said line beam relative to said
substrate support in a direction transverse to the longitudinal axis of
said line beam. The system further includes a housing encompassing said
optics, a light detector disposed inside said housing for sensing an
ambient light level, a power supply coupled to the source of laser
radiation, and a controller governing said power supply and responsive to
said light detector for interrupting said power supply upon an increase
in the output of said light detector above a threshold ambient level.