An electrically conductive titanium dioxide sputter target with an
electrical resistivity of less than 5 .OMEGA.-cm, which contains as an
additive at least one doping agent or a mixture of doping agents in an
amount of less than 5 mole %. The doping agent or agents are selected
from the group including indium oxide, zinc oxide, bismuth oxide,
aluminum oxide, gallium oxide, antimony oxide, and zirconium oxide. This
treatment renders the titanium dioxide sputter target suitable for use in
a direct-current sputtering process without any negative effects on the
properties of the coating.