The invention is directed to a chemical-mechanical polishing pad substrate
comprising a porous material having an average pore size of about 0.01
microns to about 1 micron. The polishing pad substrate has a light
transmittance of about 10% or more at at least one wavelength of about
200 nm to about 35,000 nm. The invention is further directed to a
polishing pad comprising the polishing pad substrate, a method of
polishing comprising the use of the polishing pad substrate, and a
chemical-mechanical apparatus comprising the polishing pad substrate.