A wiring pattern inspection apparatus comprises a light source, a parallel
light guiding section which guides light from the light source
substantially in parallel, and a light extraction section which extracts
a transverse wave light component crossing the light guiding direction at
right angles from the light guided by the parallel light guiding section
and which converts the transverse wave light component into a specific
polarized component and which irradiates a work with the specific
polarized component and which extracts a vertical wave light component
from reflected light obtained by reflecting the emitted specific
polarized component by the work.