The present invention facilitates semiconductor fabrication by providing
methods of fabrication that selectively apply strain to multiple regions
of a semiconductor device. A semiconductor device having one or more
regions is provided (102). A strain inducing liner is formed over the
semiconductor device (104). A selection mechanism, such as a layer of
photoresist or UV reflective coating is applied to the semiconductor
device to select a region (106). The selected region is treated with a
stress altering treatment that alters a type and/or magnitude of stress
produced by the selected region (108).