A capacitor for a dynamic semiconductor memory cell, a memory and method
of making a memory is disclosed. In one embodiment, a storage electrode
of the capacitor has a pad-shaped lower section and a cup-shaped upper
section, which is placed on top of the lower section. A lower section of
a backside electrode encloses the pad-shaped section of the storage
electrode. An upper section of the backside electrode is enclosed by the
cup-shaped upper section of the storage electrode. A first capacitor
dielectric separates the lower sections of the backside and the storage
electrodes. A second capacitor dielectric separates the upper sections of
the backside and the storage electrodes. The electrode area of the
capacitor is enlarged while the requirements for the deposition of the
capacitor dielectric are relaxed. Aspect ratios for deposition and
etching processes are reduced.