A deposition system for depositing a chemical vapor onto a workpiece is
disclosed, including a deposition chamber having a plurality of
components for performing chemical vapor deposition on the workpiece. The
deposition chamber includes an inner skin made of Hasteloy for sealing
the plurality of components and the workpiece from the air surrounding
the deposition system, and an outer skin that encloses the inner skin and
is separated from the inner skin by an air gap. The outer skin includes
vents that create a convection current in the air gap between the inner
skin and outer skin of the deposition chamber. The deposition system also
has a gas panel for regulating the flow of gases and vapors into the
deposition chamber, and a computer for controlling operation of the gas
panel and the components in the deposition chamber.