A deposition system for depositing a chemical vapor onto a workpiece,
including a deposition chamber having a plurality of components for
performing chemical vapor deposition on the workpiece. The deposition
chamber includes an inner skin made of Hasteloy for sealing the plurality
of components and the workpiece from the air surrounding the deposition
system, and an outer skin that encloses the inner skin and is separated
from the inner skin by an air gap. The outer skin includes vents that
create a convection current in the air gap between the inner skin and
outer skin of the deposition chamber. The deposition system also has a
gas panel for regulating the flow of gases and vapors into the deposition
chamber, and a computer for controlling operation of the gas panel and
the components in the deposition chamber.