The invention concerns a method for preparing gallium nitride films by
vapour-phase epitaxy with low defect densities. The invention concerns a
method for producing a gallium nitride (GaN) film from a substrate by
vapour-phase epitaxy deposition of gallium nitride. The invention is
characterized in that the gallium nitride deposition comprises at least
one step of vapour-phase epitaxial lateral overgrowth, in that at least
one of said epitaxial lateral overgrowth steps is preceded by etching
openings either in a dielectric mask previously deposited, or directly
into the substrate, and in that it consists in introducing a dissymmetry
in the environment of dislocations during one of the epitaxial lateral
overgrowth steps so as to produce a maximum number of curves in the
dislocations, the curved dislocations not emerging at the surface of the
resulting gallium nitride layer. The invention also concerns the
optoelectronic and electronic components produced from said gallium
nitride films.