A quality prognostics system and a quality prognostics method for
predicting the product quality during manufacturing processes are
disclosed, wherein the current production tool parameters sensed during
the manufacturing process and several previous quality data collected
from the measurement tool are utilized to predict the future product
quality, and a conjecture modeling step and prediction modeling step are
performed respectively. The conjecture modeling step itself also can be
applied for the purpose of virtual metrology. Further, a self-searching
step and a self-adjusting step are performed for searching the best
combination of various parameters/functions used by the conjecture
algorithm or prediction algorithm; and meeting the requirements of new
equipment parameters and conjecture/prediction accuracy.