A semiconductor device wherein the same metal gate material is used for
both an n-channel CMOS transistor and a p-channel CMOS transistor and a
manufacturing method therefor are disclosed. The n-channel transistor
includes an impurity region, a first gate laminated body that has a gate
oxide film and a gate electrode but does not have a gate electrode
sidewall insulating film, and a first silicon nitride film that has a
tensile stress and covers the surface of a semiconductor substrate and
the first gate laminated body. The p-channel transistor includes an
impurity region; a second gate laminated body that has a gate oxide film,
a gate electrode, and a gate electrode sidewall insulating film; and a
second silicon nitride film that has a compressive stress and covers the
surface of the semiconductor substrate and the second gate laminated
body.