A method and a fused compound wafer including at least one first MEMS
sensor and at least second MEMS sensor includes a first wafer. The first
wafer includes at least one first MEMS sensor first subassembly and at
least one second MEMS sensor first subassembly. A second wafer includes
at least one first MEMS sensor second subassembly, at least one second
MEMS sensor second assembly, and a fusing matrix. The fusing matrix
includes a first joint configured to encapsulate each of the at least one
first MEMS sensor first assembly and each of the at least one first MEMS
sensor second assembly forming each at least one first MEMS sensor. A
second joint is configured to encapsulate each of the at least one second
MEMS first subassembly and each of the at least one second MEMS second
subassembly forming each at least one second MEMS sensor.