In a dicing method, a dicing is performed in such a way that in such a way
that a device substrate, on which two or more devices and alignment marks
for positioning are formed, is positioned in accordance with the
alignment mark. The dicing method comprises: a substrate fixing step of
fixing the device substrate on a fixed stand in a state that the device
substrate is covered with coagulant and the coagulant is coagulated; a
positioning step of performing a positioning based on the alignment mark
in such a manner that a partial area, in which the alignment mark on the
device substrate fixed on the fixed stand is formed, is locally heated to
melt the coagulant at the partial area, so that the alignment mark is
observed through the melted coagulant; and a dicing step of dicing the
device substrate and separating the device substrate into the individual
device elements.