A method for dicing a wafer including first and second layers is provided.
A front surface of the first layer contacts a backside surface of the
second layer. The method includes: forming a sealing film on the second
layer; cutting the first layer from a backside surface along with a
cutting line to form a notch; removing the sealing film; irradiating a
laser beam on the front surface of the second layer along with the
cutting line to form a reforming region in the second layer by a multi
photon absorption effect; and dividing the wafer along with the cutting
line from the reforming region as a starting point of dividing.