A micromechanical component having a diaphragm is provided, the structure
of which effectively prevents the penetration of dirt particles into the
cavity. A method for manufacturing such a component is also provided. The
structure of the component is implemented in a layer structure which
includes at least one first sacrificial layer and a layer system over the
first sacrificial layer. A cavity is formed in the first sacrificial
layer underneath the diaphragm. In the region of the diaphragm between
the upper layer and the lower layer of the layer system situated directly
above the first sacrificial layer, at least one access channel to the
cavity is formed which has at least one opening in the upper layer and at
least one opening in the lower layer, the opening in the upper layer and
the opening in the lower layer being offset with respect to each other.