The invention provides alkene fluoroalkanol and fluorinated polyol
precursors to fluoroalkanol-substituted .alpha.,.beta.-unsaturated
esters. The fluoroalkanol-substituted .alpha.,.beta.-unsaturated esters
are olefins that can be readily polymerized to provide
fluoroalkanol-substituted polymers useful in lithographic photoresist
compositions. Also provided are methods for synthesizing the alkene
fluoroalkanol and fluorinated polyol precursors.