A manufacturing method for a semiconductor device includes a hole portion
formation step for forming hole portions whose entire width is
substantially identical to the width of the opening portion in a part of
the active surface side of the substrate on which electronic components
are formed, a curved surface formation step for curving the bottom
surface of the hole portion while maintaining the width of the bottom
surface in the hole portions substantially identical to the width of the
opening portion, a connecting terminal formation step for forming
connecting terminals that serve as the external electrodes of the
electronic circuits by burying metal in the hole portions, and an
exposure step for exposing a part of the connecting terminals by carrying
out processing on the back surface of the substrate.