A gate wiring electrode is formed into a ladder-like pattern. Moreover,
between source electrodes and drain electrodes in the entire Switch MMIC,
the gate wiring electrodes are disposed. Furthermore, at a cross part
between the gate wiring electrode and the source electrode or the drain
electrode, a nitride film having a large relative dielectric constant and
a polyimide or a hollow part having a small relative dielectric constant
are disposed. Accordingly, a capacitance at the cross part is reduced.
Thus, a second harmonic wave level can be lowered. Moreover, a leak of a
high-frequency signal between the drain electrode and the source
electrode can be prevented. Thus, a third harmonic level can be lowered.
Consequently, distortion characteristics of the Switch MMIC can be
significantly improved.